◆ Characteristic

◆ Size Nano Colloids Precisely and Quickly

○ 6 – 360 nm measurement range in under 5 minutes

○ Actual quantitative concentrations

○ Any particle, any shape, any composition, any distribution (including multimodal)

○ Great for CMP slurry, resin rinse, bio-pharma and filter characterization, monitoring and control

◆ Industry Recognition

○ C79-0113 Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems

○ C93-0217 Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water Systems

○ C98-1219 Guide for Chemical Mechanical Planarization (CMP) Particle Size Distribution (PSD) Measurement and Reporting Used in Semiconductor Manufacturing

◆ Integrated Software Platform - Kanolysis

○ Patent numbers 8,272,253 and 8,573,034 have been issued to CTA and licensed by Kanomax

○ Patent number 7,852,465 has been issued to Kanomax

○ Kanomax has applied for additional domestic and international patents for technology contained within the LNS System.

◆ 1 year warranty

◆ Advantage

○ Combines proven techniques (used by NIST, USA and AIST, Japan) for counting and sizing aerosol size distributions with a unique nebulizer technology to successfully measure particle size and number concentration in concentrated liquid suspensions.

○ Offers greater accuracy, better precision, and improved resolution in CMP slurry size-measurement results (used extensively in the semiconductor industry).

○ Straightforward data inversion without complex inversion routines, assumptions or size calibrations. The software can identify each particle-size mode and assigns a cumulative size at 10%, 50% and 90% of the distribution. Changes in the size of a specific mode can be easily monitored with these size statistics.

○ Does not make assumptions about the shape of the particle size distributions and measures actual number concentrations not relative particle concentrations.

○ In SEMI C92 the LNS is used to determine the quality of ion exchange resin. In SEMI C79 the LNS evaluates the efficiency of sub-15 nanometer filters used in ultrapure water distribution systems. No other particle instrumentation is capable of making the required measurements described by SEMI C79.