KFMT/ Scanning Threshold Particle Counter STPC 9010

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KFMT/ Scanning Threshold Particle Counter STPC 9010

KFMT/ Scanning Threshold Particle Counter STPC 9010

Current particle counting technology based on optical particle detection is inadequate to monitor particles at the line widths used in today’s semiconductor manufacturing facilities. The International Road Map for Devices and Systems (IRDS) roadmap for semiconductor manufacturing has needed sub-20 nm particle detection for several years. The ScanningTPC is the world’s first particle counter capable of detecting 10 nm particles in Ultrapure Water (UPW).
In the ScanningTPC an ultra-fine nebulizer uses patented dual-sequential impactors to remove nearly all large droplets that might generate non-volatile residue particles of 10 nm diameter and larger. These large NVR particles interfere with the measurement of genuine particles in suspension. A patented size-selectable Condensation Particle Counter continuously scans particle sizes at 10 nm, 15 nm, and 20 nm with 50% detection efficiency.
The response of the ScanningTPC is not dependent on particle refractive index or particle shape —unlike all Optical Particle Counter (OPC) or Laser Particle Counters (LPC) in use today. And also unlike all OPCs and LPCs the ScanningTPC does not use Polystyrene Latex (PSL) particles as a calibration material. The standard derivation for PSL particles < 40 nm becomes so large that they are almost unusable for the sizes measured by the ScanningTPC. Instead the ScanningTPC uses a variety of colloidal silicas traceable to the European Reference Materials colloidal silica standards.
The ScanningTPC’s 50% detection efficiency at 10 nm allows particles as small as 7 nm to be counted. By contrast, the counting efficiency of OPCs and LPCs is only 3-5% at their rated particle detection size. As the ability of even the best filters to remove 10 nm and smaller particles drops dramatically, expect to see significant particle counts when using the ScanningTPC.

Datasheet.pdf

Features and Advantages
Specifications
Applications

◆ Characteristic

◆Monitor UPW System Health and Stability

○ 50% detection efficiency at 10 nm

○ Real-time, on-line nano particle monitor

○ Counts particles of any shape, any refractive index, any composition

○ Great for monitoring organics, colloidal silica, resin beds, and other yield killers in UPW that traditional OPC’s miss

◆Industry Recognition

○ The STPC is used for compliance with SEMI C79 “Guide to Evaluate the Efficacy of Sub-15 nm Filters used in Ultrapure Water (UPW) Distribution Systems.”

○ The STPC is used for compliance with the SEMI C93 “Guide for Determining the Quality of Ion Exchanged Resin used in Polish Applications of Ultrapure Water (UPW) Systems.”

◆Patent Protected

○ Patent numbers 8,272,253 and 8,573,034 have been issued to CTA and licensed by Kanomax FMT.

○ Patent number 7,852,465 has been issued to Kanomax FMT.

○ Kanomax has applied for additional domestic and international patents for technology contained within the ScanningTPC.

◆ 1 year warranty

◆ Advantage

○ Monitors particles ≥10 nm in real-time.

○ Rapid response time to detect changes in particle contamination levels. The response is not dependent on particle refractive index or particle shape.

○ Option to specify particle sizes for continuous (non-scanning) monitoring.

○ Calibrated with Colloidal Silica (European Reference Materials traceable)

○ Portable and easy to set up. Robust with minimal maintenance requirements.

○ Simple to operate using the intuitive front-panel-display menus.

	KFMT/ Scanning Threshold Particle Counter STPC 9010
Specifications Measurement range	1E3 to 1E10 #/mL
Inspection volume rate	1 - 5 μL/min
Threshold sizes	10-20 nm user selectable in 5 nm increments (50% detection efficiency)
Number of size channels	1-3 (user configurable)
Dead time between channel adjustment	2-5 minutes
Total flow rate	50-280 mL/min
Response time to concentration change	< 30 seconds
Inlet water pressure (online)	200-500 kPa (30-70 psig)
Compressed air/nitrogen flow rate/pressure	2.5 std L/min CDA or Nitrogen, 340-410 kPa (50-60 psi)
Compressed air quality standards	ANSI IS08573-1:2010 Class 2 for compressed air
Maximum UPW nonvolatile residue	200 ppt at 10 nm threshold, 1 ppb at 20 nm
Wetted surface materials before nebulization	PFA, PTFE, PEEK, sapphire
Detector working fluid	Reagent-grade n-Butyl alcohol
Working fluid consumption rate	Approximately 150 mL/day (bottle lasts for one week)
Ambient temperature range	15-35°C (59-95°F)
Ambient relative humidity range	0-85% non condensing
Maximum water temperature	50°C (122°F)
Dimensions (W × D × H)	42 × 43 × 27 (43 with bottle) cms, 16.7 × 16.8 × 10.5 (16.8 with bottle) inches
Weight	16.1 Kg (35.5 lbs)
Power (Nebulizer)	Universal 100-240 VAC, 50/60 Hz, 90 W max
Power (Nebulizer)	Universal 100-240 VAC, 50/60 Hz, 210 W max
Output	RJ-45 for Modbus, USB FlashDrive
Internal storage	Micro SD
Ultrapure water inlet	¼ inch PFA Flaretek®
Waste outlet	¼ inch SS Swagelok®
Compressed air inlet	¼ inch SS Swagelok®
Port Display	7 inch TFT Color, touch panel
Shipping drain	Colder brand quick disconnect

◆ Applications

• wafer fab manufacturing (Advanced Technologies)
• UPW Online Monitoring
• Filter Characterization
• R&D institute
• Monitor liquid nano size particles of UPW system in advanced industry and demand