Simco-Ion’s latest Modulated Pulse (MP) Technology ionization bar is now available with active feedback/control through the Novx monitoring and feedback system. The 5645 MP bar is designed to provide industry-leading balanced ionization performance for semiconductor back-end advanced packaging and test applications and front-end demanding ultra-clean applications for fast discharge time, low swing voltages, and precision balance. This advanced technology enables AeroBar mounting within 150 mm of the wafer. Precision adjustment combined with ultra-clean silicon emitter points, the 5645 MP bar exceeds ISO 14644-1 Class 1 cleanliness and meets the Extended ISO Class 1* level for particles down to 10 nm.
When installed with the Novx monitoring and feedback system, the 5645 can maintain precise balance better than ±5V. The bar can easily adjust and fine-tune voltage, frequency, and balance to meet environmental and product sensitivity requirements. Model 5645 MP bar is available in 14 lengths, from 350-2350 mm.
○ ±5V with Novx monitoring and feedback system
○ ISO 14644-1 Class 1 and Extended ISO Class 1 with SCSi emitter; ISO 14644-1 Class 3 with Ti emitter
○ Centralize power and control with widely adjustable software
○ Sensor input, FMS connection, alarms, power and communications are located on the same end of the bar
○ Provides the active feedback/control on ESD protection with precise and stable balance
○ Compatible with all device technology nodes
○ Eliminating manual adjustment at the installed location
○ Designed for overall ease of use and long maintenance cycles
* Extended ISO Class 1: An extrapolation of ISO 14644-1 down to 0.01 micro (10 nm) particles, measured with a condensation nucleus counter (CPC).
For more information, visit www.simco-ion.com/technology/resources for our technical notes on Extended ISO Class 1.
| Model 5645 AeroBar | |
|---|---|
| Input Voltage | 24 VDC ±10%, 0.7A (max) |
| Balance | <±5V, Novx System; <±5V, Novx Inside; <±20V, Standalone |
| Discharge | 15 sec (typ) with no air-assist measured @ 24” below AeroBar center |
| Ion Emission | Modulated Pulse (MP) technology |
| Emitter Voltage | 13.5 kV peak-to-peak, max |
| Emitters | Single Crystal Silicon (SCSi) and Titanium (Ti) |
| Frequency | 0.3-60 Hz |
| Pitch |
50 mm spacing (350/450/600 mm lengths only) 75 mm spacing between nozzles on all other lengths |
| Cleanliness | SCSi Emitters: Meets ISO 14644-1 Class 1 and Extended ISO Class 1 Ti Emitters: Meets ISO 14644-1 Class 3 |
| Bar Settings | Adjustment made remotely via software controlled; no manual adjustment on the bar |
| LED Indicators | Green steady NORMAL OPERATION, green flashing STANDBY, red ALARM |
| Air Connection | 8 mm tubing (OD) bulkhead, one-touch fitting; no daisy-chain capability |
| Air Supply | Optional Clean Dry Air (CDA) or nitrogen (N2) |
| Airflow | Optional Open Jet 45 psi max gas pressure, 1-3.5 lpm/nozzle thru 8 mm OD one-touch fitting |
| Ozone | <0.05 ppm |
| EMI | Below background level |
| Operating Env | Temperature 15-35°C (59-95°F); Humidity 30-60% RH, non-condensing |
| Enclosure | ABS chassis, stainless steel rail on the outside of the bar |
| Dimensions |
3.1”H x 1.3”W x 14/18/24/34/39/45/51/57/63/69/75/81/87/93”L (14 lengths available) (78 x 34 x 350/450/600/850/1000/1150/1300/1450/1600/1750/1900/2050/2200/2350 mm) |
| Certifications | pending |
| Model 5601 Power Distribution Box | |
| Input Voltage | 24 VDC for each bank of 4 bars; 5.6A total (0.7A max/port) |
| Communication | Ethernet (RJ-45) to/from PC; individual bar standby inputs |
| Alarm Output | Relay closure to ground, max 24 VDC @ 100 mA, normal OpenCoded |
| Output | 8 RJ-45 ports (1 for each 5635 bar) |
| LED Indicators | Green PWR, Yellow COM, Red ALM, Blue USB |
| Weight | 0.94 lbs (0.42 kg) |
| Dimensions | 1.2”H x 6.3”L x 3.6”W (31 x 160 x 92 mm) |
| Certifications |
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